Cleaning Tank Hydrophone with Acoustic Meter
(HCT-series, MCT-1010)
2D acoustic plot of a 40 kHz tank indicating significant variation in acoustic field
Frequency spectrum of a megasonic tank indicating greater than 90% of intensity comes from 1st harmonic
Related pages
Preamplifiers & Other Accessories
Hydrophone Calibrations Questionnaire [PDF]
HCT-series Cleaning Tank Hydrophone
A hydrophone to characterize ultrasonic cleaners
Despite the wide adoption of ultrasonic and megasonic cleaning, the acoustic characteristics are not well understood. The HCT hydrophone with MCT acoustic meter bridges this gap, offering a reliable solution to characterize and monitor the acoustic properties of ultrasonic and megasonic cleaners. Its unique single point sensing design allows measurements with high spatial resolution to offer true 3-dimensional mapping of the cleaning tank. The rugged construction allows routine mapping of the acoustic pressure and ultimately determination of the cleaning efficiency of the tank.
Applications
- Acquire acoustic maps to optimize cleaning efficiency of ultrasonic and megasonic baths
- Routinely spot check acoustic field of cleaning tank for process control monitoring
- Compare tank-to-tank performance to maintain matching in production environments
- Develop and tune process recipes by determining the acoustic effects of varying chemistries, loading conditions, and power settings.
- Identify cleaning tank issues such as debonded or malfunctioning transducers
- Collect lower level acoustic information by connecting probe directly to an oscilloscope
Acoustic Pressure Plot of a 970kHz Semiconductor 200mm Single Wafer Cleaner indicating near field and standing wave effects
Measurement Setup
For more information about the HCT hydrophone, please download the product datasheet.
Please note Onda will be handling all inquiries directly related to the HCT hydrophone. Click here to contact us.